Used TAINICS TE3100 #9144232 for sale

TAINICS TE3100 is an etcher / asher designed for precision etching and ashing of semiconductor wafers and components. TAINICS TE 3100 offers superior performance over conventional burn-in techniques due to its unique process control and precise temperature control. The equipment allows for easy setup and adjustment of process parameters with its intuitively designed touch screen control interface. TE3100 utilizes an independently isolated process chamber made of stainless steel to ensure high temperature and precise temperature control. It can reach temperatures up to 800⁰C in a single 15 minute cycle with tight temperature control for etching and ashing. TE 3100 is designed to be user friendly with no special tools required for cleaning or maintenance. The compact design also allows for the system to be located near the wafer fabrication area for quick and easy set up and cleaning cycles. It has both an optional built in exhaust unit or can be used with an external exhaust machine to meet customer application requirements. TAINICS TE3100 also features two process gas options to enable precise temperature control of the chamber. The inert gas option is used to protect the wafer from any oxidation during the process as well as providing a stable atmosphere. The oxygen gas option is used to control the etching or ashing process. The tool also has precise temperature control of the chamber with an accuracy of 0.1°C, a temperature indicator, and an LED panel display for process duration and temperature measurement. TAINICS TE 3100 is designed to be an affordable solution for all etching and ashing needs. The process chamber is designed for repeatable, reliable processing. It also has an open architecture which enables flexibility in etching and ashing recipes and parameters. The asset also provides easy calibration and maintenance to ensure best performance.