Used TECHNICS DR 5100 #177471 for sale

TECHNICS DR 5100 is a high-performance etcher/asher designed to take care of etching and ashing requirements in the integrated circuit (IC) production process. It utilizes a multi-beam excimer laser source with automatic beam alignment technology to achieve high uniformity of dry etching throughout all areas of the IC, allowing for improved device performance. DR 5100 is a fully automated equipment with user-friendly operation, allowing for precise and repeatable processes in IC fabs with minimum staffing requirements. It features high accuracy pattern alignment for precise results, with automatic process parameters tuning for optimal results. The platform can be adapted for different etch patterns such as arrowhead, anisotropic, mesa and blanking. The machine has two independent etch and ashing processing chambers to enable simultaneous etching and ashing from the same system. The machine provides high accuracy etching depth control, adjustable etch depth and ashing speeds, precisely adjustable etch process parameters and precise aspect ration control. The pump unit for TECHNICS DR 5100 consists of two stages of a turbomolecular pump and a circular nitrogen purge and purging machine, making sure a perfectly clean vacuum. It is equipped with a precise UV laser source and can be controlled over Ethernet or RS232. The tool has the ability to monitor and control the IC under production with a camera, coupled with a monitoring asset of signals sent from the process module. This allows for real-time process feedback, and the real-time monitoring of wafer temperature, nitrogen pressure and etching depth. This is an ideal platform for an IC fab wanting to increase their throughput and enhance the production process. DR 5100 is a reliable, robust and powerful etcher/asher designed to take on all etching and ashing requirements of integrated circuits.