Used TECHNICS Micro RIE 800 #9124004 for sale

TECHNICS Micro RIE 800 is an etching and ashing machine designed for use in high-precision processes. The machine is designed for accurate, repeatable control of the etching and ashing process, providing ultimate control of the etching and ashing parameters. It employs an electrostatic chuck to hold substrates securely in place during etching and ashing operations. This etcher/asher has an excellent performance standard due to its unique design features. It has four independent electrostatic chuck stations with adjustable chamber pressure settings, enabling the user to optimize the settings for each individual job, resulting in increased throughput, cost saving and reduced wear. Its high-resolution thermal imaging system, along with its software, enables both high-precision etching and ashing with uniformity and repeatability. The chamber lid also features built-in cooling management, allowing for improved process uniformity, repeatability and accuracy. This model is designed for specific applications in the semiconductor, microelectronics and bio-chip industries. It offers a variety of individual and multiple substrate etching and ashing capabilities, along with the ability to adjust process parameters according to the application. It also has a feature for quick individual wafer pattern recognition, which provides the user with the possibility to optimize etching process parameters. On the technical side, Micro RIE 800 has a resolution of 25μm and is compatible with a range of materials such as silicon/silicon-dioxide, silica, aluminum oxide, tungsten and titanium. With a low-inductance 3-phase-power supply, it requires low-pressure requirements of less than 10 mT, ensuring precision control and process repeatability. It also has a low-induction gas supply, protects the electrodes from contamination, and ensures high quality etching/ashing results. Overall, TECHNICS Micro RIE 800 is a reliable, high-precision etcher/asher with a variety of advanced features that make it suitable for a variety of applications in the semiconductor, microelectronics and bio-chip industries. Its resolution, repeatability and precision give users quality assurance and improved process control, resulting in low operating costs, increased throughput and cost-savings.