Used TECHNICS PLASMA GMBH 300 PC #293754150 for sale

ID: 293754150
Plasma cleaner.
TECHNICS PLASMA GMBH 300 PC is a high-performance etcher/asher equipment designed for precise and efficient plasma processing of various materials used in semiconductor, microelectronics, and materials science industries. This advanced plasma system is equipped with state-of-the-art technology to deliver superior process control, repeatability, and reliability for a wide range of applications. Key Features and Specifications: 1. Plasma Source: 300 PC is equipped with a robust plasma source capable of generating highly reactive plasma species for etching and ashing processes. The plasma source is tuned to operate at various frequencies and power levels to accommodate different material types and process requirements. 2. Process Chamber: The unit features a high-vacuum process chamber designed for uniform plasma distribution and efficient gas phase reactions. The chamber is made of corrosion-resistant materials to withstand harsh plasma environments and facilitate easy cleaning and maintenance. 3. Gas Delivery Machine: The etcher/asher tool is equipped with a precise gas delivery asset to feed reactive gases into the process chamber at controlled flow rates and pressures. This ensures accurate control of the plasma chemistry and etching/ashing rates for optimal process performance. 4. Substrate Handling: TECHNICS PLASMA GMBH 300 PC supports various substrate sizes and types, including wafers, glass substrates, and thin films. The model is equipped with a robotic substrate handling equipment for automated loading and unloading of substrates, minimizing manual intervention and improving process throughput. 5. RF Power Supply: The plasma system is powered by a high-frequency RF power supply capable of delivering precise power levels to the plasma source for controlling plasma density, uniformity, and stability during processing. The RF power supply is integrated with advanced impedance matching networks for efficient power transfer and plasma generation. 6. Process Control Software: The etcher/asher unit is controlled by sophisticated process control software that provides a user-friendly interface for defining process recipes, monitoring process parameters in real-time, and optimizing process conditions for achieving desired etching and ashing results. The software also features data logging and analysis tools for process optimization and troubleshooting. 7. Safety Features: 300 PC is equipped with essential safety features to ensure operator protection and machine integrity during operation. These include interlocks, emergency stop buttons, gas leak detectors, and overpressure relief valves to prevent accidents and ensure safe handling of hazardous materials. Overall, TECHNICS PLASMA GMBH 300 PC is a cutting-edge etcher/asher tool that combines advanced plasma technology with robust design and user-friendly controls to meet the demanding requirements of modern semiconductor and materials processing applications. With its high-performance capabilities, superior process control, and safety features, this plasma asset is an ideal choice for research and production environments requiring precise and reliable plasma processing solutions.
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