Used TEGAL 1511E #9080737 for sale

TEGAL 1511E Asher/Etcher is a multi-functional, semi-vacuum, precision thin-film processing equipment designed for the production of fine-line integrated circuits on substrates. This system utilizes a combination of high-vacuum, plasma and reactive gas etching technologies to produce devices with precise dimensional control and high profile accuracy. 1511E is fully automated and capable of membrane-based, quartz-based and spin-coating masking techniques, as well as allowing for direct, non-masked silicon etching. TEGAL 1511E's main chamber is an 8"x8" stainless steel chamber, allowing for etching of substrates as small as 2"x2". The unit's process parameters are fully programmable and can be adjusted to levels as low as 1 micron, depending on the substrate and process. Its semi-vacuum machine lowers background pressure to allow for direct etching of sensitive devices, including MEMS components. 1511E features a high-efficiency turbomolecular vacuum pump, which is capable of reaching vacuum levels as low as 6x10-6 Torr. This low pressure helps to minimize the etching time and to enable higher aspect ratio structures to be etched with high profile accuracy. It also utilizes a RF power supply and a turbo-pumped biased platen to create an electron-enhanced plasma environment, ensuring excellent etch selectivity and particle reduction. TEGAL 1511E further features RPX-200 ICP source gas inputs, allowing for the addition of additional process gases for optimal etching performance. The tool can operate in a transfer-only mode or with an optional process chamber, allowing for fully programmable process parameters for interfacing with PLCs and process control software. 1511E is ideal for the production of high-aspect ratio, narrow-tolerance structures and features a streamlined operating platform, intuitive user interface and superior performance. Its maintenance procedures require minimal training and its chamber is optimized for easy replacement of wear components. It is compliant with applicable safety and environmental regulations and can be configured to meet a wide range of customer needs.