Used TEGAL 411 #9163033 for sale

TEGAL 411 is an etch/ash system designed for production wafer processing. It is primarily used in wafer fabrication for the production of integrated circuits. The etcher has a single-chamber design, which allows for multiple levels and types of etching and ashing operations to be completed within a single cycle. 411 has an upper and lower chamber, with upper and lower sources and substrates. The chambers are constructed of stainless steel and feature components that are designed to cope with highly corrosive processes, such as reactive-ion etching. There are two heating zones in each chamber, which allow for accurate temperature control. TEGAL 411 also features low-loss transfer mechanisms, which ensure high precision alignment of substrates during processing. 411 can be configured to perform etching and ashing operations on a range of semiconductor materials, including silicon, compound semiconductor materials, and polysilicon. It is capable of performing operations with hard masks, including photoresist and oxide etch/ash. TEGAL 411 also supports high throughput production, with a cycle times of 30 seconds or less. The performance of 411 is further enhanced with a combination of powerful and advanced plasma source and electron- and ion-beam systems. This allows for fewer chances of contamination and the possible application of throughput- and yield-improving techniques. TEGAL 411 includes safety features such as a motion detector and a temperature cutoff switch. These features make the etcher reliable and reduce the chance of overheating or other problems that could damage materials or cause the process to fail. 411 also features low power consumption and is well suited for 24/7 production environments. In summary, TEGAL 411 is an etch/ash system designed for production wafer processing. It is capable of performing a variety of etching and ashing operations on a range of semiconductor materials, with high precision alignment and low-loss transfer mechanisms. It also has safety features such as motion detection and temperature shutoff for enhanced reliability. 411 is a powerful and reliable system suitable for today's high throughput applications.