Used TEGAL 415 #9143547 for sale

TEGAL 415 is an etcher / asher. It is specifically designed for applications in the semiconductor industry, and provides enhanced performance through its highly accurate beam delivery systems. 415 is a fully automated equipment capable of handling various wafer sizes up to 8-inch diameter and angled wafers. It is built to maximize throughput and accuracy, while ensuring a safe environment. The system features advanced optical systems for beam delivery. This includes an isotropic beam homogenization unit that can deliver high-precision beam profiles over the entire wafer surface, ensuring uniform etching. The beam spot size and divergence is maintained with accuracy of ±1%, guaranteeing optimal etching performance. The machine also features a fully automated end point detection tool for effective control of etching process. The end point detection sensor measures the light intensity profile of the etched wafer surface, providing an accurate measure of etching achieved. The asset can be operated in manual or automated mode, enabling operators to adjust etching parameters quickly and easily. The user-friendly graphical user interface of the model makes operating the equipment intuitive even for unexperienced users. The system features a powerful cooling unit capable of maintaining temperature stability and eliminating thermal damage. TEGAL 415 also incorporates advanced safety measures, including a cover interlock safety switch that immediately shuts down the machine when opened. In summary, 415 is a highly accurate etcher / asher specifically designed for the semiconductor industry. It is capable of providing precise beam delivery, allowing it to achieve uniform etching across the entire wafer surface. The end point detection tool enables accurate control of the etching process, while the user-friendly graphical user interface allows easy operation. The powerful cooling asset of TEGAL 415 combined with advanced safety measures guarantees a safe environment for the users and the highly precise etching performance expected in the semiconductor industry.