Used TEGAL 415 #9187146 for sale

TEGAL 415 is an automated asher developed by TEGAL Corporation. It is a full-sized, standalone equipment that offers wafer die cleaning, etching, and thin-film deposition processes. 415 is a reliable, efficient, and cost-effective system, which has been proven suitable for a wide range of applications, including semiconductor fabrication, MEMS, and optoelectronic devices. TEGAL 415 consists of an automated, robotic workcell that is capable of handling substrates up to 200mm in diameter. The unit is equipped with a loading station, where the substrate is first loaded into the machine, and then automatically placed onto the etching and thin-film deposition platforms. The tool is also equipped with an integrated controller, which allows precise control over the entire process, and ensures that each substrate is processed consistently. 415 has two independent etching chambers. The first chamber is optimized for die cleaning and image etching, while the second chamber is optimized for corrosion, oxide removal, and through-wafer etching. The etching chambers are temperature and pressure controlled, and are capable of achieving process-critical uniformity, repeatability, and accuracy. TEGAL 415 also includes a thin-film deposition platform. This platform is capable of producing highly reliable layers with low surface roughness. It is equipped with rotary and linear motion stages, as well as two separate e-beam sources for coating the substrates. The asset is also capable of simultaneously processing multiple substrates, which makes it an excellent choice for production scale studies. Overall, 415 is a reliable and cost-effective asher/etcher. It is capable of handling a wide range of applications, including semiconductor fabrication, MEMS, and optoelectronic devices. Its advanced controller ensures precision and repeatability in the processing of each substrate. And its two independent etching chambers and thin-film deposition platform are capable of producing reliable and consistent results. It is an ideal solution for any semiconductor production process.