Used TEGAL 515 #293655082 for sale

TEGAL 515 is an etcher / asher, used for a range of processes in the electronics manufacturing industry. It offers deposition and etching capabilities for a variety of materials such as Si, SiO2, SiN, WSi2, metallic alloys, and other conductive and non-conductive materials. 515 is specifically designed to handle high-volume production processes. It is equipped with an array of features that facilitate efficient processing. These features include high-speed deposition and etch rates, which enable optimized throughput; precise control over process parameters, such as pressure, temperature, and gas flow; and an advanced control equipment with real-time monitoring of all parameters. The etcher / asher also provides process flexibility, with the ability to use a variety of etchant gases, as well as a mix of two or more for more complex processes. It also features a precision automatic wafer handling system, with a patent-pending vector unit that enables precise control of the position of the wafer in relation to the etching tool, as well as a high-precision bellows pump to maintain the optimal pressure during deposition. TEGAL 515 also comes with a range of other features that make for a user-friendly experience. These include intuitive operator GUI screens, easy-to-use process recipes, built-in diagnostics for troubleshooting, and multiple recipes for optimal process setups. Additionally, the machine can be configured for different recipes and process parameters to allow users to customize it for their specific needs. In summary, 515 is a high-performance etcher / asher designed for reliable and precise deposition and etching of a variety of materials. It offers fast deposition and etch rates; precise control of process parameters; a robust control tool; flexible use of etchant gases; precise wafer handling; and user-friendly features for trouble-free operation.