Used TEGAL 6000 #293616018 for sale

TEGAL 6000 is an etcher/asher designed specifically for the production of integrated circuit (IC) masks using the reliable photolithographic process. It is designed to offer a fully automated, user-friendly, and cost-effective solution that can be customized to meet any customer's needs.This equipment features a large viewing area and an exceptionally rigid structure that ensures high repeatability, accurate alignment, and long-term stability. It also features the latest in laser alignment and mask generation systems for both dry and wet systems. 6000 can handle both small and large substrates, up to a maximum of 30" in size. It is capable of producing resolutions as fine as 10 microns, with a maximum depth of 5 microns. The device employs a high speed precision x-y table, allowing for step and repeat operations. This feature makes the equipment well suited for environments where high-volume work is required. Additionally, TEGAL 6000 offers excellent sensitivity and a wide range of adjustability for etching both dry and wet layers onto wafers. In terms of safety features, 6000 has a monitored atmosphere, enabling the operator to monitor any hazardous byproducts generated during the etching process. The Closed Chamber Environment (CCE) also ensures that the work area is clean and contained at all times, reducing the risks of contamination. In terms of operation, TEGAL 6000 is easy and straightforward. The user interface offers a simple graphical menu system and a built-in diagnostics and troubleshooting menu. The large, bright, backlit LCD screen provides the user with all the information they need. The various control-tops, dials, and switches also facilitate easy operation. 6000 is an extremely useful and reliable etcher/asher, as well as being an extremely cost-effective solution for both high and low-volume production needs. Its ability to handle both large and small substrates, with resolutions as fine as 10 microns and a maximum depth of 5 microns, provide excellent etching results. With its on-board diagnostics, automated mask generation systems, and high performance, TEGAL 6000 is well suited for IC production needs.