Used TEGAL 6500 / 6540 #165814 for sale

Name: TEGAL 6500 / 6540
Brand: TEGAL
SKU: 165814
Availability: SoldOut

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

Tap to zoom

Sold

Etchers / Ashers

Manufacturer

TEGAL

Model

6500 / 6540

ID: 165814

Vintage: 2006

Dry etch system, 6" Software Main Software: Tegal Software Version 5.54 Operating System: DOS Host Interface: Tegal 65** Gem/Secs Ii Version 1.9e Human Interface Main Interface: Vga Monitor (12vdc) With Touchscreen (Front) Remote Interface: Vga Monitor (12vdc) With Touchscreen (Rear) Additional Interface: Windows Compliant Keyboard Signal Tower: Yes (Red, Amber And Green) Process Module: PM1 / PM2 / PM3 Manufacturer: TEGAL / TEGAL / TEGAL Function: PLASMA/RIE ETCH / PLASMA/RIE ETCH / PLASMA STRIPPER Environment: VERY-LOW PRESSURE / VERY-LOW PRESSURE / LOW PRESSURE Chamber: CAPACITIVE COUPLED / CAPACITIVE COUPLED / INDUCTIVE COUPLED Chuck: ESC CHUCK / ESC CHUCK / CENTERING RING Rough Pump: ALCATEL ADS602 / ALCATEL ADS602 / ALCATEL ADS602 Turbo Pump: VARIAN TV-1001 / VARIAN TV-1001 / NONE Turbo Pump Controller: VARIAN TURBO-V 1000 ICE / VARIAN TURBO-V 1000 ICE / NONE Convectron: VARIAN EYESYS CONVECTORR X2 (SUB-CHAMBER X1 AND FORELINE X1) / VARIAN EYESYS CONVECTORR X2 (SUB-CHAMBER X1 AND FORELINE X1) / VARIAN EYESYS CONVECTORR X2 (SUB-CHAMBER X1 AND FORELINE X1) Baratron: MYKROLIS CMX100 (100mTORR) / MYKROLIS CMX100 (100mTORR) / MKS CAPACITANCE MANOMETER (1TORR) Ion Gauge: EDWARDS ACTIVE GAUGE AIM-S-NW25 / EDWARDS ACTIVE GAUGE AIM-S-NW25 / NONE Pressure Control: VAT THROTTLE VALVE (61246-PIGG-AEG1) / VAT THROTTLE VALVE (61246-PIGG-AEG1) / VAT THROTTLE VALVE (61246-PIGG-AEG1) Endpoint: DIODE ARRAY / DIODE ARRAY / DUAL DIODE RF GENERATOR (Mhz) MKS OEM-12B / MKS OEM-12B / MKS OEM-12B RF GENERATOR (Khz) ENI LPG-6ATM 1 / ENI LPG-6ATM 1 / NONE Mfc 1 CF4 (50sccm) CF4 (50sccm) O2 (2000sccm) Mfc 2 Cl2 (50sccm) Cl2 (50sccm) O2 (200sccm) Mfc 3 NOT USED / HBr (50sccm) NOT USED / HBr (50sccm) N2 (200sccm) Mfc 4 CHF3 (100sccm) / CHF3 (100sccm) / NONE Mfc 5 Ar (50sccm) Ar (50sccm) NONE Mfc 6 O2 (50sccm) O2 (50sccm) NONE Wafer Backside: Flow He (5Torr UPC) He (5Torr UPC) NONE Purge Gas: N2 / N2 / NONE Vent Gas: N2 / N2 Temp. Control: HEAT EXCHANGER ON CHUCK AND UPPER WALL (80 DEG CELSIUS) / HEAT EXCHANGER ON CHUCK AND UPPER WALL (80 DEG CELSIUS) / CHUCK COIL HEATER (250 DEG CELSIUS) Temp. Control Unit: NESLAB DUAL CHANNEL TCU / NESLAB DUAL CHANNEL TCU / THE SIXTH SENSE AI-100 TEMP. CONTROLLER Rinser Module: PM4 Manufacturer: SEMITOOL Function: SINGLE WAFER RINSER/DRIER Environment: ATMOSPHERIC Chamber: PTFE BOWL W/ PVDF LINED HEAD COVER Chuck: PTFE FINGER CANTILEVER ON HEAD ROTOR Rotor: STEPPER MOTOR W/ LC-1 MOTOR DRIVER Rinser Head: LIFT AND ROTATE ASSEMBLY Purge Gas: N2 Diw Temp: 80 DEGREES CELSIUS Temp. Control: IN-LINE HEATER (PVDF HOUSING WITH PFA-JACKETED HEATING ELEMENT) Temp. Control Unit: TEGAL DIW HEATER CONTROLLER Pre-Aligner Module: PM5 Manufacturer: BROOKS AUTOMATION Function: WAFER FLAT AND CENTER ALIGNER Environment: VERY LOW PRESSURE Chamber: ALUMINUM HOUSING MOUNTED TO CORE Chuck: FORK WITH RUBBER PADS Transfer Module: TM1 TM2 Manufacturer: ASYST ADE Function: THETA AND RADIUS ROBOT ARM Z-AXIS, THETA AND RADIUS ROBOT ARM Environment: VERY LOW PRESSURE ATMOSPHERIC Controller: ASYST UTC-100A CONTROL SYSTEM ADE SERIES 350 ARM CONTROLLER Chamber: MOUNTED INSIDE THE CORE CHAMBER MOUNTED ON THE ATMOSPHERIC PLATFORM Modules Serviced: CM1, PM5, PM1, PM2 AND PM3 PM3, PM4 AND CM2 Casette Module: CM1 CM2 Manufacturer: TEGAL TEGAL Function: SENDER RECIEVER Environment: ATMOSPHERIC / VERY LOW PRESSURE ATMOSPHERIC Chamber: ALUMINUM HOUSING MOUNTED TO THE CORE PLATFORM-TYPE Elevator: YES / NO Wafer Sensing: RETRO-REFLECTIVE SENSOR (INDIVIDUAL WAFER SENSING) RETRO-REFLECTIVE SENSOR (BLOCK SENSING AFTER CASETTE IS LOADED) Vent Gas: N2 NONE Convectron: VARIAN EYESYS CONVECTORR X1 NONE Miscellaneous: CORE Manufacturer: TEGAL Function: HEXAGON-SHAPED CORE CHAMBER Environment: VERY-LOW PRESSURE Chamber: ALUMINUM HOUSING WITH CLEAR ACRYLIC TOP COVER Rough Pump: ALCATEL ADP122 Turbo Pump: VARIAN TV-301 Turbo Pump Controller: VARIAN TUBO-V 301 VAVIGATOR CONTROL UNIT Convectron: VARIAN EYESYS CONVECTORR X2 (CORE X1 AND FORELINE X1) Facility Requirements Ac Power: YES WITH POWER TRANSFORMER (380Vac Secondary, 3φ, 75KVA) Cda: YES Diw: YES Cooling Water: YES Industrial City Water : YES Warehoused 2006 vintage.

Read More Close

TEGAL 6500 / 6540 are advanced etch and asher systems designed for processing advanced semiconductor devices. The high-tech etching and ashing equipment utilizes the latest technological advancements, providing the most reliable and highest quality results. 6500 / 6540 etcher/asher is an impressive machine with numerous features that make it perfect for various applications in the semiconductor industry. The system is based on the advanced LPCVD technology with two distinct processes; ashing and etching. This enables the user to simultaneously process both processes. The unit also features a unique low-pressure ashing module that helps reduce particle contamination and increase yield. TEGAL 6500 / 6540 features a temperature controlled environment and an advanced reaction chamber that are highly reliable, providing consistent processing. The LPCVD technology provides the optimum environment through the pressurized chamber, to produce quality parts. An integrated vision machine monitors the processing results and reactions to ensure that the parts retain high quality levels. The tool is designed for both manual and automated processing, making it highly versatile for various processes and applications. For automated processing, 6500 / 6540 controls the pressure and temperature during ashing, as well as controlling the etching. The asset also offers precision monitoring and diagnostics, and integrated analysis capabilities to ensure process performance. TEGAL 6500 / 6540 also has advanced material handling capabilities. The built-in robots work together to deliver parts in the most efficient sequence for process optimization. The model is also equipped with a unique conveyor equipment, which delivers product quickly and efficiently. 6500 / 6540 is capable of ashing and etching through numerous materials, including metals, ceramics, semiconductors and plastics. The system has been designed to support a wide variety of chemical processes including ISO-CVD, OXCVD, and MWBE, among others. Additionally, the unit has incorporated safety features, such as safety interlocks, emergency stops, and explosion-proof features. TEGAL 6500 / 6540 provides consistency and high quality results in a wide variety of applications. With its advanced ashing and etching capabilities, the machine offers reliable processing and consistently high quality results. The tool also offers a variety of advanced features and integrated capabilities, making it an ideal etcher/asher for different production capacities.