Used TEGAL 6540 #9267990 for sale

TEGAL 6540 is a state-of-the-art etcher / asher that combines both speed and precision in its etching and ashing processes. With a multi-station design, 6540 can be customized to meet the etching and ashing requirements of a wide variety of materials, including silicon carbide, silicon nitride, nitro-molybdenum (NMO) and tungsten. As a top-of-the-line model, TEGAL 6540 offers a higher etching rate than other models, allowing for faster and more efficient etching and ashing processes. 6540 also features a unique four-zone chamber layout, providing quick access for etching and ashing. The four-zone chamber includes two plasma zones and two reactive gases zones. In addition, TEGAL 6540 can be adjusted to handle both etching and ashing at the same time. 6540 is a fully-automated machine with a unique multi-axis configuration that offers high etching and ashing rates for a variety of surfaces. TEGAL 6540's chamber is divided into four zones, with each zone capable of producing a different etching and ashing effect. Using an automated optical alignment equipment, 6540 can automatically adjust for any imperfections in the etching or ashing process, providing high-precision results. In addition, TEGAL 6540 features an automatic cleaning system that utilizes a variety of cleaning agents to remove debris and other contaminants from the chamber and optics. The cleaning unit also features a rotating arm machine that helps reduce the time it takes to clean the chamber. Overall, 6540 is a cutting-edge etcher / asher that provides a reliable, efficient, and precise tool for etching and ashing a variety of materials. With its state-of-the-art design, TEGAL 6540 is an ideal choice for a wide range of etching and ashing applications.