Used TEGAL 701-03 #9097594 for sale

Manufacturer
TEGAL
Model
701-03
ID: 9097594
Wafer Size: 3"
Plasma etcher, 3".
TEGAL 701-03 is an advanced aqueous-based etcher / asher designed to etch/ashessilicon wafers and thin films. It is a reliable and cost-effective solution that can be used in a variety of applications in the microelectronic industry. Built with a unique cold-chamber design, 701-03 is capable of working with wet etching speed up to 0.25um /second and ashing speed up to 10um/second. An adjustable speed controller ensures users can manually adjust the speed of etching/ashing for optimized results. It also features advanced technologies such as intelligent process control. This technology accurately monitors etching/ashing process parameters such as temperature, pressure, and flow rate in order to ensure consistent quality of the product. It is also equipped with an automated safety feature to prevent accidents and damage to users and wafers. TEGAL 701-03 is compact and highly efficient. It is designed with an effective vapor containment system which prevents acid fumes and corrosive gases from escaping the chamber. It is also configured for easy integration with other systems like scales, receivers, and exhaust systems. 701-03 is environmentally friendly and made of corrosion-resistant material. The asher can also be used in conjunction with various chemicals including hydrofluoric and nitric acids. The etcher/asher is also compatible with all types of tanks and spray guns and can easily be configured for customization. Ultimately, TEGAL 701-03 is the best choice for an etcher/asher when precision and accuracy are mandatory. It helps to reduce costs, increase operational efficiency, and provides superior performance due to its compact design, reliable technology, and advanced features.
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