Used TEGAL 701 #293621568 for sale

TEGAL 701 is an etcher and asher manufactured by TEGAL Reliability Engineering. It is designed for the precision etching and ashing of semiconductors and other small electronic components. 701 is an advanced instrument offering automated, high-throughput, continuous loading, programmable, and precise control of etching and ashing processes. The built-in microprocessor provides software programmable logic, user-defined profiled temperature ranges and pulse parameters, and ramping and dwell times. The etcher / asher can be configured with 2 heating stations to 6 temperature ranges and 9 programmable recipes, allowing for custom profiling and fine-tuning of each etch / ash process. It is equipped with two quartz tungsten halogen (QTH) lamp heating elements and a precision temperature control mechanism with a measureable temperature variance of +/- 0.5 °C. TEGAL 701 has an ergonomic design and is easy to operate, featuring a 7-inch color LCD touch screen, with an intuitive and user friendly GUI. The user also has access to comprehensive data logging and error reporting. Additionally, all process parameters and settings can be configured remotely via the RS-232 port. The etcher / asher has an advanced safety system, featuring an automatic gas shut off system when a process fails and an oxygen sensor, providing a warning before etch / ash imperfections due to low oxygen levels. 701 also includes a variety of other features such as automated mask removal, substrate mapping, and a spare part tab. In conclusion, TEGAL 701 is a reliable etcher and asher that provides a complete range of features for the efficient etching and ashing of semiconductors and other small electronic components, setting high standards for etching performance. Its user-friendly GUI, precise temperature control, automated gas shut-off system, and comprehensive safety features make it an excellent choice for etching and ashing precise and precise components.