Used TEGAL 701 #293621577 for sale

TEGAL 701 is an advanced automated etching and ashing instrument used by manufacturers to cost-effectively etch and ash substrates. It is comprised of an etch/ash chamber, high-frequency generator, pressure controller, and computer-controlled programmable system. The etch/ash chamber houses the substrates and is equipped with an automatic conveyor. It has eight key-operated automated door locks and provides operator protection. It also ensures the correct atmosphere and process parameters during etch/ash operations. The high-frequency generator allows the etcher/asher to operate under DC or RF power and process with the ability to adjust to the exact parameters and proper conditions to achieve optimal results. 701 is equipped with a customizable voltage switching feature, allowing precise control over current and voltage output The pressure controller allows precise monitoring and control of pressure, allowing precise control over etch/ash rates and process times, while also helping to prevent over-etching and damage to the substrate. Meanwhile, the computer-controlled programmable system is a user-friendly interface that allows users to quickly and easily select desired etch/ash parameters, track the process and report results. With its operator-adjustable digital touchscreen display and speed control, TEGAL 701 also enables precise adjustment for setting temperature, pressure and etch/ash cycles. 701 etcher/asher is also remarkably energy-efficient. It uses only a small amount of reactive gas and energy, making it an economically attractive processing solution for handling all types of substrates. It is also equipped with a guardian safety monitoring system that monitors, records and alarms the process in real time. With its efficient, precise, and reliable in-line etching and ashing, TEGAL 701 provides an advanced automated etching and ashing solution to meet the needs of manufacturers in a variety of industries.