Used TEGAL 701 #9000653 for sale

TEGAL 701 is an etcher/asher used for high-resolution microelectronics. It is a powerful tool for removing unwanted material from semiconductor substrates, and is often used to etch fine patterns with a fine, precise edge. The equipment utilizes a high-powered laser source to create a focused beam of light, which is then directed onto the substrate. This beam is used to deposit a chemical compound onto the substrate and then vaporize the material in order to create small holes, or microetch patterns. 701 has an optical table that is designed to accommodate large substrates, up to 1200 mm in length. It can etch down to 0.3 μm of resolution, allowing for precise control of the etching process. The machine is fully automated, which allows for fast, highly reliable etching and ashing processes. It also features a temperature-controlled process chamber that helps to maintain a uniform temperature throughout the cycle, which ensures better reproducibility of the etch process. It also offers an autofocus option that allows for scanning of the substrate quickly and easily. The system also features an arc monitoring unit, which measures trace voltage arc at the beginning and end of etch cycles. This ensures that the substrate material is not over etched, reducing the risk of damage. The machine also allows for in-depth post-process analysis, giving users detailed information on the etch process. The tool also includes TEGAL 701's internal software, which can be used to monitor and control the process. This includes automatic adjustment of parameters, allowing users to fine-tune their etch process. Additionally, it provides diagnostic capabilities, allowing users to identify and address issues quickly and effectively. 701 etcher/asher is designed for use in research and development departments. It is ideal for producing etched features to exacting standards in a variety of industries, such as electronics, medical, and automotive manufacturing. With its high-precision etching capabilities and automated process control, it is an invaluable tool for creating complex, high-quality parts.