Used TEGAL 803 #9180201 for sale

TEGAL 803 was an etcher and asher developed by TEGAL Devices, Inc. in the 80s. It was designed for use in the development of integrated circuits, including for the production of various levels of metal and dielectric production for thin, small-scale electronic components. 803 was a high-performance etcher and asher used to form thin-film metal and dielectric structures. It featured state-of-the-art components, including a panel-mounted digital display and powerful etcher and asher engines. TEGAL 803 had a variety of features designed to allow users to precisely plan and execute processes. The ashing rates could be controlled from 0.1 to 5.0 watts with 0.01 increments, while the plasma etching rate could be set from 0.3 to 5.0 watts with 0.01 increments. It also had an advanced power supply that could support a range of plasma powered techniques, including Toe Pressure, Pressure Supported, and Bubble Etching. Its user-friendly panel allowed integrated circuit designers and engineers to quickly and easily input and adjust parameters, such as pressure, power, and process sequences. 803 was equipped with a wide range of materials and components, including a high-precision differential pressure control subsystem, a tilt-control feature that allowed the user to control the trajectory of the process, and a dedicated multi-gas supply and purge system. The system's controller was integrated into the panel, allowing for precise and repeatable etching of thin-film structures. TEGAL 803 also incorporated an indexed multi-pocket wire-level deposition technique that offered powerful i-line and DUV mask imaging capabilities. 803 was designed to be highly reliable and consistent. Its advanced ISO 9000-certified auto-sequencing and auto-tracking features allowed users to rapidly develop thin film structures with precise uniform density distributions. Its robust metal deposition feature could achieve thicknesses of less than 2 microns and feature widths as narrow as 1 micron. Additionally, its advanced ECR (electron cyclotron resonance) processing allowed for faster etching rates and improved edge convergence for complex etching structures. In short, TEGAL 803 was a powerful and reliable etcher and asher designed to help integrated circuit engineers quickly and accurately develop thin-film metal and dielectric structures. It featured advanced digital display and etcher/asher engines, precise control of process parameters, and a robust selection of materials and components. Thanks to its high-performance features and ISO 9000-certified auto-sequencing and auto-tracking, 803 offered users dependable results, aiding in the development of thin-film micro-scale electronic components.