Used TEGAL 900e #84748 for sale

TEGAL 900e is a high precision, all-in-one etcher and asher designed by TEGAL Corporation. It offers direct access to both etching and ashing processes, making it ideal for industrial use. TEGAL 900 E is a standalone vacuum system that is capable of etching and ashing at up to 500 Watts of power. Its etching tray can accommodate substrates measuring up to 400mm in diameter and 25mm in thickness. The etching process is accurately controlled with the full PID temperature control and timer settings, which can be configured via the LCD display, allowing for precise profiling. An optional chill plate is available to further improve the temperature control. 900e also offers 6 standard etching recipes that can be loaded and executed at the push of a button. These recipes are optimized for 900 E process, ensuring that settings are accurate and repeatable. The etching tray can also be equipped with linear motion stages for addition control or to automate cleaning or other processes. TEGAL 900e also functions as an asher. The asher tray has a maximum capacity of 500mm in diameter, with optional adapters and trays that can increase the capacity. An integrated gas counter breath device allows for precise gas exchange control, and the temperature is monitored and controlled to ensure accuracy of emissions. TEGAL 900 E is a reliable and powerful etcher and asher that can easily fulfill the demands of any application. With its intuitive controls and smart features, it's an excellent choice for industrial use.