Used TEGAL 900e #9121969 for sale

TEGAL 900e is an innovative etcher/asher equipment designed to enable precise, accurate etching or ashing of a wide variety of materials. With advanced flexible technology, TEGAL 900 E offers the ultimate accuracy and flexibility for applications ranging from simple single layers to complex hard masks and metal structures. 900e is equipped with an innovative Ultra Plasma Generator (UPG) with an advanced RF source for photoresist exposure, providing up to 22kW of highly efficient power in the 10-13.56MHz range and matched to the control electronics for controlled plasma generation. This allows for both traditional etching and ashing/deposition. The system includes innovative automated processes, such as uniformity engineering, algorithm-based optimization and fault detection techniques to ensure the best etching and ashing results. A variety of gas mixes and pressure levels can be specified to accommodate different materials processing needs. 900 E unit has an integrated load/lock mechanism for quick and easy loading and unloading of parts. It also includes a modular configurable shutter machine with self-contained mechanical curtains that can be used to isolate the chamber from the open atmosphere during operation. This shutter tool ensures safety and enables the asset to be fully automated. The model is equipped with a control panel, which includes a 7" display screen, for easy equipment monitoring and control. Additionally, TEGAL 900e offers site-level controller integration, external access to program parameters and real-time data logging capability. TEGAL 900 E is a powerful tool for producing complex device structures, and provides the accuracy, repeatability, and throughput needed for a wide variety of applications. It is a cost-effective solution for production of high-quality parts in the semiconductor, medical, and other industries.