Used TEGAL 901 #293624765 for sale

TEGAL 901 is an organic etcher/asher machine designed for applications that require high precision etching of organic layers for device fabrication. The machine is capable of both etching and ashing and uses an advanced computer-controlled positional scanning system. 901 utilizes two types of chambers, the etch chamber and the asher chamber, each with a variety of functions and capabilities. The etch chamber is a standard etch cell with the latest integrated technology and engineered to meet a wide range of device fabrication needs. It operates using 10 to 150V at gas pressures of several hundred to several thousand Torr and chemistry flow rates of 0.1 to 4.0 SCCM. The chamber features two electrodes and a DC or RF power source for uniform and consistent etching. It also offers real-time display of process parameters, enabling the user to accurately monitor etching conditions for maximum process fidelity. The second chamber, the asher chamber, is designed for dry etching processes. It uses an advanced F1-Chem™ reactive ion etching (RIE) gas chemistry system, which is capable of both etching and ashing. Its operation is adjustable to operate at different pressures, temperatures, and power levels, allowing for maximum process flexibility. The chamber features a large F1-Scan processing cell, with the scan area being adjustable in both the x and y axis for flexible sample processing capabilities. It is capable of producing exceptional accuracy with fast sample processing times. TEGAL 901 is an excellent choice for organic etching and ashing applications. It is designed to provide excellent yields, reduced operation costs, and ultra-high-precision etching capabilities. Its powerful embedded software provides high-speed control and data integration, making it ideal for device fabrication. It offers an array of useful features and robust performance for demanding etching and ashing applications.