Used TEGAL 901 #293655088 for sale

TEGAL 901 is a high precision etch/ashe equipment designed to produce desired patterns on etch/asheable surfaces such as those used in MEMS fabrication. The system has the capability to process samples ranging in size from wafers to substrate or chip level devices. 901 utilizes a combination of thermal and plasma etching techniques to accurately and cleanly fabricate desired patterns to exacting standards. TEGAL 901 features a two stage process, first an etching step and then an ashing step. During the etch process, heated gas is used to etch the sample's surface. The thermal etch process causes precise removal of surface material due to the motion and chemical reaction of the gas molecules. After the etching step is completed, the unit then uses a plasma asher to completely remove any remaining material on the sample. 901 utilizes a high end control panel to adjust and monitor parameters such as temperature, pressure, and gas flow rate. It also has the capability to program a specific etch pattern. This allows the user to precisely replicate an image or pattern on the sample surface. The machine is designed for repeatable and reliable results over time. To ensure quality, the manufacturer has included various fail-safes that shut down the tool in case of any unforeseen events. It also has the capability to be updated with the latest software patches for optimal performance. Lastly, the asset maintains an internal log of past etching event and results for traceability and documentation. In conclusion, TEGAL 901 etch/ashe model is a reliable and powerful tool for producing precise patterns on wafers and chip level components. Its sophisticated control, monitoring and programming features allow for repeatable results and reliable performance. In addition, the equipment's advanced safety measures ensure the quality of the etched product.