Used TEGAL 901 #293752942 for sale

TEGAL 901 is an accurate, efficient, and reliable etcher/asher designed for high-end semiconductor device manufacturing. It boasts a number of advanced features and functions, making it one of the most powerful etchers/ashers available. It is suitable for applications such as etching through oxide layers, ashing of photoresist, and oxide deposition. 901 utilises a high-accuracy 150mm x 150mm process area for maximum yield, with selectable spatial resolutions ranging from 3.5 microns to 10 microns. It also provides a precision temperature control system, which can finely adjust the process window from 200°C to 950°C. This ensures optimal etching or ashing conditions are maintained throughout the manufacturing process. TEGAL 901 also features advanced automation and control, with the capability to operate simultaneously up to four cassette loaders and up to twelve rotating cassettes. This allows the simultaneous processing of up to twelve wafers. In addition, the easy to use user interface gives the user complete control over the process. This includes the ability to accurately monitor and adjust process parameters, set alarms, and detect tool performance drift. 901 is also highly efficient, consuming up to 85% less energy and producing up to 50% more wafers per hour than the standard industry systems. This aid in reducing both energy consumption and manufacturing cost. Furthermore, sophisticated environmental mitigation systems ensure that dangerous gases and particulate residue are kept at a safe level, ensuring safe and efficient operations. TEGAL 901 is an efficient, powerful, and reliable etcher/asher designed for high-end semiconductor device manufacturing. With its advanced features and functions, 901 provides high performance and accuracy for optimum yield.