Used TEGAL 901 #9113439 for sale

TEGAL 901 is a compact, high-performance etcher / asher equipment developed by TEGAL Corporation. This asher / etcher is used to achieve high-resolution patterning of substrates with high uniformity. 901 offers precise etching and ashing processes that require highly accurate, repeatable results. It uses a broad range of etch and ashing chemistries to ensure uniformity in etching and ashing processes. It utilizes proprietary process control algorithms for precise process control. The system uses a proprietary high-temperature burnout algorithm to achieve uniform burnout that eliminates unwanted side-wall contamination. TEGAL 901 also features high-resolution optical patterning capabilities to ensure the highest possible precision and accuracy of etch and ashing process. 901 is equipped with an advanced control panel that makes the entire etching and ashing process user friendly and efficient. It uses a touch-screen interface to control, monitor, and configure the unit parameters during the process. This panel enhances visibility, making the entire process easier to monitor and control. Additionally, the asher / etcher includes several built-in safety and monitoring features that ensure process reliability and high-quality result. TEGAL 901 is designed for high-performance, low-cost operation. It has high throughput capabilities and minimal maintenance, ensuring maximum resource utilization efficiency.The machine produces high-quality, repeatable, crisp, and uniform patterns, with exceptional wafer yield rates.Additionally, it offers various wafer configurations and substrate material compatibility, including aluminum, polysilicon, doped silicon, silicon dioxide, aluminum oxide, gallium arsenide, and SiGe materials. 901 features high temperature operations, allowing high-speed etching and ashing and improved yield rates. It also incorporates an advanced burnout algorithm to eliminate the need for cooldown phases, making the etcher/asher more energy efficient. In addition to its efficient operation, TEGAL 901 has a compact and robust design and supports several safety features, making it ideal for industrial applications.