Used TEGAL 901 #9226736 for sale

TEGAL 901 is an advanced etcher/asher with a fully customizable platform that enables precise material processing. With the ability to operate with the hottest temperature and highest long-term deposition rates available on the market, 901 enables efficient protection and mechanical isolation of both single and multiple layer assemblies at a broad range of materials. This state-of-the-art etcher/asher is powered by up-to-date technology, including a digital camera system and secure off-line control panel. It also includes a range of process optimization options, allowing for delicate etching and ashing varieties with precise control of time, temperature, pressure and oxygen levels. TEGAL 901 utilizes a special hydrochloride-free gas for etching and pressure control devices for keeping the oxygen levels in the desired range during ashing. 901 also features an independent chamber heating system that allows for automated processing of material stacks at varying temperatures with no additional jacket heating elevation. Moreover, the unit features a unique temperature stability system, so that the temperature remains stable despite wide material temperature variations, which enables more efficient etching and prevents variations in the process. In addition to the above, TEGAL 901 has the ability to control shockwaves during shock and storage processes. It additionally incorporates a 480nm laser beam for customizing etching and ashing operations to meet any material and process requirements. Additionally, the unit is equipped with an advanced double-oxide ion implantation technology for high-precision deposition of metals, dielectrics and other materials. All in all, 901 is a powerful and versatile etcher/asher that offers some of the highest long-term deposition rates and the most advanced and accurate material processing features on the market. It is an ideal tool for a wide variety of etching and ashing needs, with the ability to adjust to almost any process and material specification.