Used TEGAL 901 #9250120 for sale
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ID: 9250120
Wafer Size: 6"
Vintage: 1985
Nitride etcher, 6"
Missing parts
1985 vintage.
TEGAL 901 is an advanced etcher / asher used primarily for process control and wafer fabrication in semiconductor production. It uses a high-precision electron-beam system to photochemically deposit materials to the substrate surface. The substrate is generally a semiconductor wafer, but can also be a glass or polymer substrate. 901 provides accurate, repeatable process control and monitors the substrate level in real time. The user can customize the process settings to meet specific requirements. The etching/asking process is a type of etching process that uses an electron beam to cause chemical reactions that alter the surface of the substrate. The electron beam then acts as a "masking" agent for the design, allowing the etching process to take place accurately on the identified design. TEGAL 901's electron beam can be finely tuned to the substrate material and the process settings to provide precise process control. Additionally, this etcher / asher features uniformity control, which calculates the power, position and beam length. This ensures that the etching process occurs at a consistent rate and at a specific substrate level. 901 also features a variety of other advanced capabilities, such as advanced temperature control and thermal change profiling. This feature helps to protect the surface from heat damage and ensures that the temperature is even throughout the substrate. TEGAL 901 is also designed to improve the speed and accuracy of etching processes. It uses a powerful electric motor and speeds up to 25 m/s. This speed minimizes the deposition time and maximizes accuracy and repeatability compared to manual methods. Overall, 901 is a robust and reliable etcher / asher designed specifically for process control and wafer fabrication in semiconductor production. It features advanced capabilities that improve the speed and accuracy of etching processes and provide enhanced process control. This etcher / asher is designed to reduce uniformity errors and mitigate thermal change. TEGAL 901 is a versatile solution suitable for a variety of processes.
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