Used TEGAL 901 #9408120 for sale

TEGAL 901 is an automated wafer production equipment that uses advanced etching technology to produce customized wafers with precision. The system is capable of performing high-resolution, high-precision wafer production on a variety of materials, including silicon, gallium arsenide, and diamond-like materials. The etching process is designed to reduce thermal damage and preserve the quality of the materials being processed. The unit utilizes variable etch times and an advanced elastically matched etch recipe for superior process control, enabling superior production throughput and yields. 901 comes equipped with an integrated gas cabinet that dispenses acid vapor required for the etching process. The machine is capable of performing a variety of wet etches as well as dry etches. The wet etches include selective etching, hot phosphorescence etching, and wet blasting. These processes provide excellent process control, uniformity and higher yields. The dry etches on TEGAL 901 are designed to reduce the risk of contamination in the etch process. The tool utilizes ICP-RIE (Inductively Coupled Plasma Reactive Ion Etch) process which operates at higher temperatures to promote uniformity and create a better profile in the etched surface. The asset also offers a unique MEMS etch process, which is optimized for Micro Electrical Mechanical Systems products. 901 is specifically designed to provide an etching model that is capable of producing higher yielding products at a lower cost than its competitors. The equipment's tight process control, uniformity and precision provide improved production quality and yields for a variety of product types. The integrated gas cabinet allows for quicker and more efficient etching process and its advanced elastically matched etch recipes provide superior process control and yields.