Used TEGAL 901ACS #293651580 for sale

TEGAL 901ACS is an etcher/ashes designed and manufactured by TEGAL Corporation, a leader in semiconductor processing equipment. 901ACS is specifically designed for high performance plasma etching and cleaning applications. It has one of the highest throughputs in its class, allowing users to achieve faster processing times while maintaining superior accuracy. Its dual-chamber design allows users to achieve both etching and cleaning processes in the same chamber. TEGAL 901ACS is equipped with an up-front gas cabinet and simplified gas delivery equipment to reduce costs by providing standardized gases and simplify maintenance. Its precision optics and automated control system helps to ensure repeatable, reliable process results. Additionally, a large viewport provides an unobstructed view of the chamber for process control, easy maintenance, and viewing of the entire process. The high power RF generator of 901ACS is capable of producing a 400 Watt, 13.56 Mhz plasma source. The unit also has a wide range of process recipes available for additional flexibility. Additionally, TEGAL 901ACS incorporates an advanced ion source design which helps to provide the best possible uniformity in the etch or clean performance. 901ACS is designed with safety and reliability in mind. It has a variety of safety features that help protect personnel, equipment, and the environment. These include a dedicated chiller and water filtration unit, infrared safety sensors, and a failsafe shutdown machine. In summary, TEGAL 901ACS combines powerful performance, state-of-the-art technology, and advanced safety features to provide users with a reliable etching and cleaning experience. It is a great choice for users who need to achieve superior process results in minimum time. With its high throughput, precision optics, and advanced control tool, 901ACS is capable of delivering the results that both semiconductor engineers and technicians are looking for.