Used TEGAL 903 & 903E Series #425 for sale

TEGAL 903 & 903E Series is an etcher/asher, an advanced tool for etching, ashing, and dry etching across a wide range of applications, specifically for MEMS and semiconductor-related device fabrication. It uses an innovative heated gas-flow equipment to etch and ashe targeted materials, offering high etch rates, improved device throughput, and reduced etch cycle times. 903 & 903E Series has a large, wide chamber, with a large etching area of 300 mm x 400 mm x 40 mm. It has a low-maintenance quartz tube, smooth ceramic walls and high-precision drive system with a variable-frequency controller to control the etch rate. The unit has many advanced process controls, including pressure, temperature, gas-flow, protective-gas type, chamber-venting speed, parameter selection, and load/unload. Overall, TEGAL 903 & 903E Series offers superior etching performance along with many advanced process controls to enable high-precision etching and ashing of traditional metals and new materials. The machine is built for reliability, low maintenance and economical operation. 903 & 903E Series features a large process-window, fast etch rates and improved device throughput. Its also designed to reduce particle contamination and enable superior throughput with shorter cycle times. The series can perform laser-activated etching, ion etching, reactive ion etching, plasma etching, and RIE of dielectric, pictronics, and optical materials. This makes it suitable for a variety of industrial and commercial applications, including electro-optics, photonics, semiconductor device fabrication, and MEMS. Overall, TEGAL 903 & 903E Series is a high-performance etcher/asher that offers superior etching performance, high etch rates, superior device throughput, and improved cycle times. The tool has many advanced process controls that enable precise etching and ashing of traditional metals as well as new materials for a variety of industrial applications.