Used TEGAL 903 #173938 for sale

TEGAL 903 is a manual, electrostatic, plasma etching/ashers used in the fabrication of high technology products such as semiconductor wafers. It is one of the most versatile and powerful dry etching equipment for use in advanced research, development and prototyping laboratories. The machine can etch/ash a wide variety of materials such as silicon, metals, dielectrics, passivates and many other substrates. The etching process is highly precise and has the capability to etch microscopic features with high selectivity. The machine uses advanced new technology of a plasma-powered electrostatic field generator to drive the metal ions and other reactive materials to the surface of the wafer. 903 has dual, isolated electrostatic chambers which allow multi-mask etching and variable temperature range of operation. Both chambers can be operated at different temperatures, allowing the user to produce complex patterned etchings while controlling burial depth. With its adjustable pressure and temperature settings, TEGAL 903 can achieve a wide range of deposition thicknesses. This allows for the selection of optimal etching speed and output quality. 903 is capable of producing extremely high etch rates, especially when working with materials such as silicon and germanium. The machine features an advanced vacuum system that maintains a stable etch environment for high throughput and repeatability. The automatic level control feature allows for repeatable etch profiles from wafer to wafer. TEGAL 903 offers excellent accuracy and repeatability. Its versatile design allows for easy access to all etching procedures, including masking, deposition, etching, and cleaning. Its user friendly interface, intuitive menu structure and advanced technology make it a great choice for professionals in semiconductor device fabrication. The machine is affordable and provides reliable operation in a cost effective manner.