Used TEGAL 903 #293594520 for sale

TEGAL 903 is a modern, direct-write lithography equipment designed for the fabrication of nanostructures with precision and efficiency. The system uses advanced optics, positioning systems, and specialized software to precisely expose a photo-resist to a light source. High-resolution lenses and mirrors are used to focus the light energy onto a substrate, allowing for controlled lithography. This unit is capable of patterning nanostructures down to tens of nanometers. 903 is an industry-standard device that can be used with a variety of substrates and resists to create nanostructures with high precision. The machine incorporates several components, each of which play a vital role in the lithography process. The light source module is the key component of the tool and the type of light source used will depend on the pattern that needs to be written. Depending on the job, the light source can be a laser, i-line, or ArF excimer laser. In addition to the standard optical components, TEGAL 903 incorporates a stage positioning asset with three-axis motorized and manual control to ensure precise substrate positioning. To ensure an accurate pattern, the model has sophisticated aligning and metrology tools to ensure the perfection of the exposed pattern. Additionally, 903 offers several process control parameters, including dose and focus control, applied voltage, and pellicle positioning, to enable precise process control for a variety of applications. The equipment also includes an ancillary light source for resist baking that heats up to 200°C. The software powering TEGAL 903 is designed to provide an intuitive user interface which allows for rapid sample creation and rapid prototyping. 903 is the widest range etch and asher system tailored specifically for nanomaterials, offering the flexibility to suit a variety of customer's unique production needs. With its advanced optics, intelligent software, and precision motorized control, TEGAL 903 allows users to etch and asher nanostructures with greatly precision and repeatability.