Used TEGAL 903 #9007913 for sale

TEGAL 903 is an etcher/asher designed for production of small random logic and memory chips. It is equipped with an electron beam source and a beam deflection equipment that allow it to achieve high throughput and consistent etch quality. 903 has been proven to reliably produce wafers with feature sizes below 1 micron. This system features an advanced perforated sputter gun with an independently adjustable gridded electron beam emitters that are capable of ionizing and depositing materials in very high precision fashion. The integration of this advanced electron beam source with the innovative beam deflection unit allows for high throughput etching at resolutions below 1 micron, which is useful for features like ultra-fine line widths and contact holes. The machine comes with a number of innovative features to ensure process repeatability and process control. A closed loop feedback tool uses a charge coupled device camera to monitor etch progress and make mid-etch corrections to maintain critical process parameters like uniformity, contact hole accuracy, width, and depth. The asset is also equipped with adjustable gas valves that allow users to precisely control etching parameters like sidewall angle, deposition rate, feature size, and etch rate. An etch rate monitor also helps to provide feedback to maintain uniformity across the wafer. To ensure process accuracy, TEGAL 903 uses precision scrubbers and a three-dimensional wi-fence capability to ensure that patterns are transferred from the mask to the wafer with high accuracy. The programmability of the model also allows for highly-customizable recipes so that users can tailor their process to their specific needs. One of the most notable features of 903 is its multi-tool nature. It can be used for etching, plating, and other types of processes to meet a variety of production needs. With its high-throughput capabilities and sophisticated control algorithms, TEGAL 903 is perfect for volume production of random logic and memory chips.