Used TEGAL 903 #9071954 for sale

TEGAL 903 is a high performance etcher/ascher system designed for processing a wide variety of substrates. It has a maximum etch rate of 400 nm/min, and a maximum deposition rate of 500 nm/min, making it ideal for processing larger substrates. It has an advanced dual pass process that allows for uniformity across the entire substrate, and as such is well suited for precise etching and deposition processes. 903 features a range of adjustable parameters, meaning users can tailor their processes to suit their specific needs. These include various process variables, such as process pressure, chamber temperature, process duration and gas composition, as well as process-specific parameters, like endpoint detection and reactive gas mixing for etching and deposition. TEGAL 903 features a full range of safety systems, such as automatic carbon dioxide and nitrogen purge, pressure monitoring, over voltage protection and ground fault interrupter. All of these safety systems ensure that the device can be operated safely. 903 also has a high level of automation and control, allowing for precise control over etch and deposition processes. It also features a user friendly graphical user interface (GUI) which is designed to make the operation of TEGAL 903 easier and more efficient. 903 is suited for use in semiconductor fabrication, electro-optical, microwave and MEMS devices. It is also well suited for many other applications, such as data storage devices, materials characterization, photonic device fabrication, and bio-medical devices. In conclusion, TEGAL 903 is an advanced, multi-functional etcher/asher system designed for a broad range of applications. It features a dual pass process for uniform substrate processing, adjustable parameter control to tailor processes to the individual user's needs, a range of safety systems to ensure safe operation, and a user friendly GUI for efficient operation. It is well suited for many different applications, as evidenced by its broad range of users.