Used TEGAL 903 #9076197 for sale

TEGAL 903 is a high-end plasma-based etcher/asher device used for the precise and reliable etching/ashing of various materials, such as silicon, gallium arsenide, indium phosphide, and silicon-on-insulator (SOI) substrates. This advanced equipment features an innovative design that combines a reliable, high-resolution electro-optic scanner and an optically-controlled computer-controlled etching chamber. 903 is an all-in-one system that enables both etching and ashing of substrates, making it ideal for many different applications. TEGAL 903 is highly accurate and efficient, with a resolution of 1 micron, a precision of 0.5 micron, and speed of 5 ms/ micron etching for thick materials and 0.3 ms/micron etching for thin materials. This ensures that all etching/ashing processes stay as accurate and consistent as possible. The unit can also be set to handle up to four different patterns using four different etching gases. This allows the user to create intricate, 3-dimensional structures accurately and quickly. 903 is equipped with a unique plasma generator that is powered by a low voltage source. This generator is designed to produce a stable plasma jet for all processes, enabling consistent results regardless of substrate type. The machine also consists of a highly accurate computer interface, allowing for precise parameter settings to be characterized and refined quickly and easily. TEGAL 903 is relatively easy to use, as all operations can be automated via the user-friendly control panel. The tool has built-in safety features, and the etching chamber is attached to a modular frame. This frame reduces vibration and movement during operation, allowing for consistently accurate processes. In addition, 903 also comes with a variety of optional vacuum pumping systems that can be used to reduce the total etching time. Overall, TEGAL 903 is an advanced etching/ashing asset that provides both accuracy and precision at an affordable price. It can handle a variety of different processes and substrate types, and its intuitive design allows for even complex etching processes to be completed quickly and without error. 903 is an ideal choice for users looking for a reliable, efficient, and cost-effective etching and ashing solution.