Used TEGAL 903 #9250122 for sale

TEGAL 903 is a batch style, vapor-phase etcher/asher used in high-end vapor phase etching and ashing applications that require precise results over large quantities. It features a patented low-temperature process (LTP) with patented plasma-based precursor chemistry, which delivers a deeply-etched feature with optimized topography. The equipment is designed to include a wide variety of process modules to ensure a high level of precision in etching, vapour deposition, and deposition processes. These modules include 3D etching, controlled-time etching, advanced film formation, atomic layer deposition, and other proprietary processes. 903 is an automated system, meaning it can be programmed to perform a number of different etching and ashing processes without manually adjusting the equipment. The machine is outfitted with multiple precision components and automation measurements that ensure its repeatable performance. The equipment has a range of 1250 to 2500 watts of power, making it ideal for high-volume etching and ashing applications. The unit also includes an optional turbo-pulse drive, allowing it to run even higher powers and to provide an even more precise etching depth. TEGAL 903 features patented temperature compensation technology that allows the machine to adjust its power and process parameters as needed to ensure a consistent etching depth. It also has a unique Gas Heaterflow (GHF) tool that delivers a highly uniform distribution of the process gas. Additionally, the asset operates at a low temperature with a self-aligning thermal platen that reduces the chances of trapping gases in the surfaces of the device. The equipment includes a large number of options, including an on-board recipe manager for programming of etching and ashing recipes, and many analytical tools to monitor the process, including tilted-angle imaging, SEM, and X-Ray analysis. These tools allow users to maximize the accuracy and productivity of the equipment. Lastly, 903 features a powerful vector-driven motor for high accuracy and repeatability. TEGAL 903 is a versatile and precise etcher/asher that is capable of producing excellent results for high-volume etching and ashing applications. Its wide range of process modules, advanced features, and customizable options make it an ideal tool for a variety of etching and ashing needs.