Used TEGAL 903E Series #83010 for sale

TEGAL 903E Series Etcher/Asher is an advanced in-line chemical etcher and asher equipment used for a wide range of applications, including semiconductor device manufacturing, printed circuit board production, and MEMS device fabrication. The system is designed to etch and asher with accuracy, speed, precision, and a high degree of flexibility. TEGAL 903E includes an advanced xy-axis motion stage, a high-resolution optical encoder table, and a PC/Windows/Software operating environment. The motion stage includes a long-stroke linear drive and durable, repeatable stage motion that facilitates large area etching and ashing processes. The high resolution optical encoder table provides precise, consistent positioning and repeatable motion to ensure accurate etching and ashing. The PC/Windows/Software operating environment is user friendly, allowing for easy and intuitive control of the unit. TEGAL 903E incorporates a multi-zone vacuum machine that provides a sealed environment for etching and ashing. The vacuum tool adjusts to the numeral of processes needed, and can range from single-zone to multiple-zone processes. Additionally, multiple etch recipes can be programmed into the asset for different processes, allowing for simple, repeatable etch and ashing processes. TEGAL 903E also features an advanced Cool-GasTM nozzle control model, which provides precise control over gas flow and pressure levels to enhance etching and ashing process control. Additionally, the equipment includes a wafer temperature monitoring and feedback system which can automatically adjust the cool-gas nozzles conditions to ensure substrate temperature accuracy and stability. TEGAL 903E also includes advanced networking capabilities. The unit can be networked to other etching and ashing systems, or to a customer's process computer to allow for easy process monitoring and control. Additionally, the machine can be networked to a customer's existing control software to integrate with other in-line processing systems. Overall, 903E Series Etcher/Asher is an advanced and reliable etching and ashing tool designed for applications requiring precise control and repeatability. The asset incorporates a wide variety of features and capabilities that provide users with the flexibility to perform etching and ashing with accuracy, speed, and precision.