Used TEGAL 903E Series #92424 for sale

TEGAL 903E Series is a revolutionary single-chamber direct asher / etcher equipment designed to rapidly process wafers, chips, substrates and materials with a critical focus on precision and accuracy. TEGAL 903E is based on a fully automated platform, permitting process variables and recipes to be controlled with a touch of a button, providing superior repeatability of results. Featuring both wet and dry etch processes, TEGAL 903E is the perfect tool for advanced process development and production testing in the semiconductor, nanotechnology, and MEMS marketplace. The 903E offers superior accuracy and repeatability due to its precise computer-controlled robotic arm and precise computer-controlled etch chamber. This system is capable of exceptionally quick processing of small samples with a high degree of accuracy. TEGAL 903E etching unit is designed for high-throughput applications, with a process chamber, calibrated for the exact amount of etch solution. An extra-large reaction chamber permits complete coverage of wafers and samples, enabling maximum etching efficiency. The 903E also features a simple and easy-to-use touchscreen user interface, with onboard software and multiple control languages. All quench, etch, and dry operations are fully automated and precise, providing solid consistency and precise control of the process. TEGAL 903E permits users to optimize the etching and deposition processes for specific materials, and to customize process recipes. Wafers are automatically loaded and unloaded in TEGAL 903E, with sample orientation fully automated. The unique rotating and vibrating sample feature helps minimize particle accumulation and surface roughness. The 903E also includes an advanced quench procedure to minimize wafer damage and post-etch roughness, while achieving higher etch rates, and improved resolution. 903E Series is a powerful, all-in-one etching, and asher / etcher machine. With higher throughput, excellent precision and accuracy, improved repeatability, and full automation, TEGAL 903E is an ideal solution for rapidly processing small samples for a wide range of applications. Its superior quench procedure offers excellent wafer integrity, improved etch rates and resolution, resulting in high-quality, consistent results.