Used TEGAL 903E #293594316 for sale

TEGAL 903E is a unique etcher / asher that offers an integrated approach to asher and etching. It features two forms of wafer etching and two forms of ashing for better performance and reliability. This etcher/asher is capable of working with various substrates and has the capability to process single layer and multiple layer applications. The unit is designed to run with a single supply voltage and has both etch and ashing models. It has a bottom plate which is used to carry the wafer during the etch processes. The base plate has a ring connected to it that provides precision and uniformity to the etch process. The heating system of TEGAL 903 E is designed to maintain uniform temperature to ensure accurate etching. After the etch process, the wafer is cooled to a predetermined temperature before being sent to the asher. The asher component of 903E features two different forms of ashers from which to choose, depending on the application. The first option is a rapid asher, which is ideal for applications that require a quickly completed etch and ashing process. The second option is the slow asher, which is ideal for higher precision work and slower etch and ashing processes. Both of these ashing options are equipped with adjustable temperature settings, allowing users to attain the exact desired results for particular applications. To increase the etching and ashing rates of 903 E, there are two multi-sputtering options. These are used as an equivalent to multiple-etching, as they can disperse an increased amount of etching gas evenly over the wafer before the etch and ashing process begins. The anode and cathode nets of TEGAL 903E are designed to ensure optimum etching and ashing performance, with the power supplies providing a controllable etching process. Finally, TEGAL 903 E is equipped with a computer interface, allowing users to automate the entire etching and ashing process. The automated process can be used to quickly and accurately etch and ashene wafers without significant operator intervention. The computer interface is easy to use and program, meaning users have complete control of the entire process. 903E is an effective etch and ashing system that is suitable for a variety of applications.