Used TEGAL 903E #293828280 for sale

TEGAL 903E is a state-of-the-art etcher/asher that is designed to meet the needs of a wide range of applications. This ruggedly built equipment features high-efficiency etching and ashing capabilities, making it the perfect choice for industrial use. By combining reliable performance and precise control, TEGAL 903 E is a cost-effective choice for a variety of applications. 903E is a dual-chamber system that includes a two-position, multi-gun unit and a fixed-centering, variable-etch gun configuration. The two-position gun unit allows for the precise control of two etching or ashing guns simultaneously, allowing the user to conduct multiple processes in the same chamber. The fixed-centering, variable-etch gun configuration further increases the control and application range of 903 E, allowing for precise variations in etching or ashing parameters. TEGAL 903E is capable of etching/ashing silicon substrates up to 8" square with high accuracy. It also features a computer-controlled reverse-biasing RF source that is capable of precisely controlling the etching or ashing process. TEGAL 903 E is designed to ensure consistent results, even after multiple identical runs. An in-situ RF monitor allows for the user to check the RF source and process parameters during the etching and ashing processes, providing insight into any potential abnormalities that may occur during the process. 903E provides a number of useful process control functions. The unit can be programmed to perform preset etching or ashing depths, as well as varying depths to patterned areas. The machine also includes a dynamic range of process parameters, allowing for fine adjustments to the etching or ashing process. These process controls provide a high level of reliability, allowing for the user to achieve repeatable results. 903 E is constructed from quality components and materials, making it a highly durable tool. The asset can withstand a wide range of environmental conditions, including temperature variations and exposure to acids, bases or solvents. The model also features an automatic shutdown equipment, which protects TEGAL 903E from overheating. Overall, TEGAL 903 E is an advanced etcher/asher designed to meet the needs of industrial users. It features a robust design, precise control and reliable performance, making it an excellent choice for a wide range of applications.