Used TEGAL 903E #33638 for sale

TEGAL 903E is an asher/etcher equipment designed to accurately and efficiently etch, process, and deposit thin films on a variety of materials and substrates, including Silicon, Sapphire, Silicon Nitride and Silicon Oxide. The first stage of the etching and processing process is the substrate pre-processing. This is done by the Pre-Wet Station which uses four cleaning solvents and filters to remove contaminants from the substrate before etching. The substrate is then loaded onto the hotplate for pre-heat. TEGAL 903 E has a superlinear etch source called E-Beam to etch thin film patterns. This source produces highly anisotropic etching of the substrate and maintains critical feature sizes and electrical characteristics. 903E uses a proprietary LLA™ Source tool to deposit thin films on the substrate and bond them with an adhesive. This deposition process ensures the uniform and consistent quality of the finished product. The etch/deposition process is a closed-loop control system to optimize the uniformity of the film deposition. It can be set in real time to control parameters such as time, rate and pressure, while delivering the highest level of precision. 903 E comes with a range of safety features and has been designed to protect workers from injury. The control unit makes use of safety shut-off mechanisms to prevent overloads and over-heating. The machine comes with an in-built fire alarm machine and is fitted with explosion-proof enclosures. TEGAL 903E is an efficient and reliable machine for etching and processing of a variety of substrates and thin films. Its closed-loop control tool allows for a repeatable and precisely-controlled etch/deposition process while its safety features provide the highest level of protection to operators.