Used TEGAL 903E #9004065 for sale

TEGAL 903E is an etching equipment specifically designed for the production of submicron photolithography. With its 6-inch wafer capacity and a full suite of features, TEGAL 903 E is an ideal choice for advanced lithographic requirements. 903E features a robust, modular design, with a high-resolution image formation system and a dedicated high-precision XY stage. The XY stage moves the wafer in discrete steps, allowing for the high-accuracy etching of photomasks, grayscale masks, and arrays of arbitrary complexity. 903 E can etch with a variety of media, including silicon, chromium, tungsten, and gold, as well as photopolymers used for negative photoresist. The process can be tuned to specific layer thickness and crystallographic orientation of the desired structure. Furthermore, the unit can be configured to include a number of plasma-based processes, such as plasma-enhanced chemical vapor deposition (PECVD). TEGAL 903E is equipped with powerful data analysis and manipulation tools. This provides users with the ability to compare etching results in real-time, and supports the development of custom fabrication procedures. A wide variety of images can be displayed in real-time on the machine's monitor, and precise adjustments in pattern orientation and repeatability can be made with ease. TEGAL 903 E is highly reliable, with 25 ppm processing speed and a minimized need for maintenance. It is equipped with a safety interlock tool and environment monitoring features to ensure the highest degree of safety for both the user and the machine. Finally, 903E comes with a suite of user-friendly software, providing users with intuitive control of the asset's functions. With its wide range of features, 903 E is an excellent choice for any advanced lithographic application.