Used TEGAL 903E #9181763 for sale

TEGAL 903E is a fully automated, high throughput etcher/asher specifically designed for semiconductor fabrication processes. Featuring a 225 mm x 225 mm x 6.5 mm work chamber and operating temperature range of 10°C to 100°C, this efficient etcher/asher offers unrivaled uniformity and accuracy. Configured with a variety of options, TEGAL 903 E offers flexibility to meet a wide range of processing needs while still delivering exceptional performance. The robust and reliable 903E can process a variety of materials including metals, alloys, polymers, and other materials, with etching times of under 45 seconds. The precision ceramic boat chuck ensures excellent material-wafer contact and uniformity. Offering three distinct etching processes, 903 E can accurately produce anodic FETs, epitaxial layers, and thin-film devices. Once completed, wafers are cleaned and dried automatically, allowing the system to quickly move on to the next batch. Equipped with Siemens & TTE software, TEGAL 903E is easy to use and configure without the need for a dedicated technician. A user-friendly, graphical user interface helps ensure accuracy and precision, while safety features like light curtains and interlocks provide an extra layer of protection for operators. This system also comes with a comprehensive library of process recipes, allowing users to quickly and easily customize their etching processes without much effort. In addition, TEGAL 903 E is capable of producing high-resolution, high-quality images at resolutions as low as 1 micron for viewing and imaging. The built-in programmable vision system is designed to control the stage movements, temperatures, vacuum level, and other crucial parameters for accurate etching. For additional convenience, 903E can be integrated with other systems and controllers in the manufacturing environment. 903 E delivers exceptional results, helping users achieve quality outputs with minimal effort. The robust build, excellent performance, and user-friendly UI make this the ideal machine for manufacturers and production facilities looking to quickly and accurately create precision components and integrated circuits.