Used TEGAL 903E #9250125 for sale

TEGAL 903E is an etching and ashing equipment specifically designed for the production of advanced MEMS components. It is an automated etching and ashing system with components such as a load/unload station, etching chamber, and multiple wafer cassettes, each with a temperature control and monitoring unit. The unit is designed to handle a wide range of substrate sizes, and is compatible with both stand-alone and multi-cassette operations. It is capable of performing both wet rinse and dry etches and ashing operations, with a precision down to 0.5 microns. The automation of the process allows for higher throughput, with up to 4 micron repeatability. The machine is designed to produce reliable results with a minimum of manual handling. Its advanced temperature control and monitoring tool ensures optimal temperature settings for the etch process. Its low size jitter also ensures a low contamination rate during etching and ashing processes. It also allows for a consistent etch depth with uniformity across the substrate. The asset also includes several safety features such as automatic alarms in case of too low or high temperatures, and several vacuum settings which can be adjusted for different processes. As well, it has an anti-ice feature readily available allowing for quick and safe processing. TEGAL 903 E has a wide application range. It can be used in the production of micro-electronic components, MEMS modules, as well as electronic and nano-electronic components. It offers protocols for a variety of etch and ashing processes like CVD, etching, dry etching and dry ashing. For its features and applications, 903E is a reliable and versatile etching and ashing model. With its precision, high throughput, and automation capacity it is suitable for a wide range of industrial and research applications.