Used TEGAL 903E #9265524 for sale

TEGAL 903E Asher is a powerful etch and ashing equipment used for a variety of applications, such as high density circuit board etching, contact processing, full die patterning and processing, and more. Offering unparalleled performance, TEGAL 903 E includes a wide range of capabilities and features to provide the best possible results for its users. 903E has been designed to meet the toughest challenges in cutting-edge process technologies. It offers an innovative, high-speed etch and ashing process that is incredibly reliable and provides for extremely small feature size capability. 903 E has an extensive range of system operational parameters which enables extremely versatile operation and meet the tightest specification needs. In terms of etching, TEGAL 903E provides a wide range of etch technologies, such as wet and dry plasma, electro-chemical, RIE (reactive ion etch) and more. Furthermore, the machine has built-in user-selectable features, such as etch parameter settings, gas recipes, process sequence control, recipe management and the ability to etch through contact layers. The unit also incorporates advanced capabilities, such as ion beam etching, high rate etching, and extended range etching, as well as an automatic load/unload machine for batch processing. In terms of ashing, TEGAL 903 E also provides an wide range of ashing technologies and user-selectable ashing parameters to optimise the process. The tool includes advanced ashing technologies such as electron beam ashing, aqua HF (hydrofluoric) ashing, paste-back ashing and selective sputter etch ashing. Additionally, 903E provides for the highest degree of process control, with its built-in recipe management, filtration asset, gas regulation, pressure control, and more. In summary, 903 E provides cutting-edge etch and ashing process technologies, as well as very advanced capabilities and features. It is an extremely reliable model that is suitable for a wide range of etch and ashing applications, both for small and large production needs. With its extensive range of equipment parameters and user-selectable features, TEGAL 903E is the perfect system for advanced etch and ashing processes.