Used TEGAL 903E #9269138 for sale

TEGAL 903E
Manufacturer
TEGAL
Model
903E
ID: 9269138
Wafer Size: 6"
Etcher, 6".
TEGAL 903E is an advanced plasma etcher / asher. It is an advanced reactive etcher / asher, which is used to create cuts and patterns on multiple layers and surfaces. Additionally, TEGAL 903 E is a highly efficient etcher / asher, capable of providing ultra-short distances between cuts, allowing for extremely precise etchings and patterning. When using 903E, the reactive chamber is filled with a suitable gas mixture - usually a low-pressure reaction gas containing carbon tetrafluoride or oxygen. Once the chamber has been filled and the pressure has been regulated, the etcher/asher is switched on and the reactive gas is introduced into the etching chamber. At this point, a controlled concentration of ions is blasted onto the sample surface, allowing for extremely precise etching and patterning. The etching time can be changed to meet the user's requirements and the ion concentration can be varied for different etching characteristics. The sample is exposed to a fluorescent light to initiate a plasma-mediated etching reaction. During this process, the ions react with the sample material, quickly removing material from the sample surface. This process is repeated throughout the etching cycle, until the desired pattern is achieved. The etching process is controlled by a computer software interface in order to ensure accurate and repeatable etching characteristics. In order to maintain its high-performance capabilities, 903 E is designed with a high-temperature heater plate in the etching chamber. This ensures that the etcher / asher maintains an optimal temperature range and that the gas remains in its reactive state. Additionally, TEGAL 903E also utilizes a horizontally-oriented control arm, allowing for precise and separate control of the reactive ions and sample. TEGAL 903 E is a versatile, high-performance etcher / asher, capable of creating precise and complex patterns on many different surfaces. Its features offer users a reliable, consistent, and cost-effective way to create intricate etchings.
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