Used TEGAL 903E #9394684 for sale

TEGAL 903E is a state-of-the-art etcher/asher specifically designed for the production of high-quality semiconductor and photomask devices, displaying superior dependability and performance in extensive etch applications. It is equipped with many advanced features that ensure efficient, reliable and precise processing every time. TEGAL 903 E is capable of performing deep and high-resolution etching on a variety of materials, including silicon wafers, ceramics, metals and glasses. It has a large working chamber and is equipped with an afterburner to manage dust and particles. 903E's unique linear nozzle design ensures efficient, high-quality etching that can create features with uniform width and depth. 903 E features programmable sulfuric acid delivery for automated and precalibrated etching, providing precise control and uniform results every time. Its inert atmosphere delivery equipment eliminates contact between the material and the etchant. This eliminates the risk of contamination and damage caused by etchant reaction with the substrate surface. TEGAL 903E is designed from the ground up to meet the highest requirements in etching and ashing applications, with features such as a fast-to-moderate processing speed, configurable integration of various process gases, reactive ion etching capability and back-side etching support. It is able to preserve the integrity of the materials during etching, even at high temperature and also provides precise control of parameters such as temperature, pressure and flow. TEGAL 903 E is an all-in-one etcher/asher, with an intuitive user interface and extensive monitoring capabilities to ensure the quality of the etching process. It is capable of multiple sensing and location methods, with a choice of several vision systems and image capture. The machine also comes with automatic process control functions to ensure the compatibility of the substrate and etchant, as well as automatic processes for stopping the etcher/asher under undesirable conditions. 903E is designed to operate with a wide variety of media, such as carbon dioxide, sulfur dioxide and nitrous oxide, at operating temperature ranging from 250 to 650 degrees Celsius. The system is equipped with temperature control, which monitors the process to maintain optimal conditions. It also features an advanced safety unit for optimal safety in the workplace. 903 E is well suited for use in both production and research environments. The machine is designed for easy maintenance, with insights from an embedded machine that allows for close monitoring and troubleshooting. This etcher/asher is also equipped with a number of sophisticated protocols and safeguards to ensure the integrity of the data gathered and ensure process safety. TEGAL 903E is an ideal solution for etching and ashing applications, providing unsurpassed reliability and precision in an all-in-one solution. Its multiple features and advanced safety tool guarantee consistent, high-quality results for a wide variety of substrate materials.