Used TEGAL 905 #163758 for sale

TEGAL 905 is an etcher/asher, a piece of equipment used for dry etching and ashing in integrated circuit (IC) production. It is a tool that uses a multi-process gas delivery equipment to enable an efficient and repeatable etching and ashing process. The tool has a single 8" wafer capacity in an ultra-compact platform, designed to reduce footprint and optimize cleanroom workspace efficiency. 905 has a fully integrated process controller to provide a consistent and repeatable process, with millisecond-level time resolution. Its advanced process control technology increases etching precision by enabling the adjustment of process parameters during plasma operations. Its gas delivery system enables independent control of gases, allowing users to select an optimal blend of gases for each etching process. TEGAL 905 also has an integrated distribution cassette, which reduces the time needed to switch wafers between processes and substantially increases throughput. Its programmable cassette positions allow users to adjust the timing of the etch and ash processes to maximize productivity and quality. Furthermore, the tool's Opto cell detection ensures that only one wafer is processed at a time, minimizing contamination. 905 also includes an advanced safety unit that enables fail-safe operations and maximum operational up-time. Its three-tier safety machine includes a Class 1 and Class 2 interlock tool, a pressure sensitive over-pressure valve, and a pressure sensitive ceramic valve. Optional purge pumps and exhaust systems are also available to keep the chamber clean and free of contaminants. With its advanced process control technology and safety features, TEGAL 905 is an ideal tool for high-precision production needs. Its small size, fast processing speed, and integrated gas delivery asset offer a highly efficient and economical solution for IC manufacturers.