Used TEGAL 915 #84339 for sale

TEGAL 915 is an etcher/asher known for its highly precise patterning and imaging capabilities. The tool utilizes precision focused beam technology for localized circuit patterning, and integrated automated load locks for rapid tool set-up. It also comes with Probe Station and Lamination Equipment with optional adaptation of substrate measurement systems. 915 has a dedicated work chamber outfitted with construction walls, adjustable shields, temperature controllers, temperature sensors, and vacuum systems that help maintain a consistent environment for optimal etching and imaging performance. The tool contains a highly precise scan head with four-axis motion and a full array of imaging sensors. It also has a large vacuum chamber with a loading capacity of up to 26 full-size wafers or equivalent. A field replaceable nozzle system with three interchangeable nozzles (gas, etch/methylene iodide, and carbon injections) allows for customization and optimization of the etching process. The overall flexibility of TEGAL 915 makes it suitable for wide variety of applications and processes. Its cluster configuration utilizes sharing features such as common Substrate Transfer Chutes (STCs) and 'Zone' connections to allow multiple tools to work together to create complex and intricate patterns. 915 also employs an ionized cluster beam autofocus unit with higher accuracy and repeatability compared to other etchers in its class. Various settable parameters of TEGAL 915 such as substrate sizes, sample type and thickness, gas supply ratios, and pressure range allows for greater experimentation and adjustment of the etching processes. The tool is further enhanced with an integrated semi-automatic cleaning cycle for maximum productivity and safety. In summary, 915 is an advanced etcher/asher ideal for highly precise applications thanks to its cutting-edge imaging and beam technologies, wide range of settable parameters, flexible cluster configuration and automated cleaning cycle. TEGAL 915 is an all-in-one etching and ashing machine, which makes it a highly versatile and essential tool for any lab or facility involved in research and development projects.