Used TEGAL 915 #9210224 for sale

TEGAL 915 is a high-precision automated wafer etcher / asher designed for production of RF MEMs, photonic devices, and nano-electronic components. This purpose-built machine is crafted with superior precision and repeatability, offering high throughput at lower operating costs. It utilizes an ample 75 x 75 cm open chamber and built-in-gas manifold with a wide variety of process gas sources, enabling users to create optimal coating thickness and uniformity with various compounds. Its dual-cathode electron-beam sources provide an extremely uniform etching rate, allowing users to accurately determine etch time and maximize yield. Furthermore, with its front-load loading/unloading configuration, intuitive control equipment, and comprehensive integration capabilities, 915 ensures a reliable and efficient process. Thanks to its advanced cooling system, all components remain at a low temperature, making the etch process clean, safe, and steady. The closed-loop feedback technology further ensures repeatable accuracy in etch results and also heightens the reliability of the unit. It regularly monitors the operating parameters and offers real-time adjustments to fluctuations from the optimal. Plus, with its robust hard protective coating and ultra-clean technology, TEGAL 915 prevents leakage of process gases and contamination of etch results. In terms of maintenance and upkeep, 915 is low-maintenance and user-friendly. Its automated self-check HMI keeps users informed of component status and provides quick access to alerts, allowing users to stay informed of performance levels. Finally, it is backed by an advanced and comprehensive Technical Support Team, ensuring the machine is calibrated and in perfect working order.