Used TEGAL 915 #9220755 for sale

TEGAL 915 etcher / asher is a computer-controlled etching and ashing process used to fabricate semiconductor wafers. It features an integrated furnace with four deposition sources, three independent rotating etching/ashing electrodes, and an automated process chamber. 915 is designed with advanced OptiPulse™ technology to provide precise control of etch depth and uniformity over the entire surface of the substrates. The equipment is also capable of processing a variety of thin-film materials including polysilicon, aluminum, nickel, and titanium. TEGAL 915 is designed to provide highly uniform etching and ashing. It uses a range of integrated processes, such as the Enhanced LPCVD (ELPCVD) process, to ensure that etch depths and uniformity are globally controlled. Its OptiPulse system allows for precise etch uniformity and depth down to 1 micron levels, with adjustable etch rate control for fine-tuning of the etch profile. Its four deposition sources are designed to provide high deposition rates, uniformity, and precise thin-film layer thickness control. A dedicated rotating electrode is capable of precisely forming etch patterns according to user charted shapes. 915 is equipped with a large process chamber, capable of processing up to 2-inch thick wafers. A comprehensive control unit allows for custom automatic recipe creation and easy access to parameters, allowing users to fine tune processes for the best possible results. Its flexible automation permits fast process shifts and efficient throughput; its intensive user friendly graphical user interface allows for easy operation and recipe recall. In summary, TEGAL 915 etcher / asher comes with a variety of features that enable fast and uniform etching and ashing of thin-film materials such as polysilicon, aluminum, nickel, and titanium. Its OptiPulse machine ensures precise etch depth and uniformity, while its integrated processes and rotating electrodes allow for fine-tuned customization and automated Recipe creation and recall. 915 is designed to provide fast process shifts, efficient throughput, and superior uniformity.