Used TEGAL 915 #9244755 for sale

Manufacturer
TEGAL
Model
915
ID: 9244755
Vintage: 1994
Etcher Gases: Nitrogen, Oxygen, Methane 1994 vintage.
TEGAL 915 is a high precision etching/Asher equipment designed for the most demanding applications that require accurate etching/Asher of substrates such as silicon wafers, copper and aluminum plated foam substrates, and other materials. It utilizes both free-space laser technology and catalytic chemical etching for accurate, precision etching and ablation. The laser source of 915 is capable of processing both semiconductor and non-semiconductor materials with a high level of accuracy and reliability over the entire range of temperatures. The laser is equipped with a rotary mirror to provide uniform and precise laser-spatial patterns, and a scanner head that can control the spatial pattern of the laser beam. The system is also capable of providing a wide range of laser frequencies. Its wide-track galvanometer scanning unit provides dynamic control over the laser power, so that the exact amount of material needed to be etched can be accurately and precisely defined. TEGAL 915 also provides a number of catalytic chemical etching options. The machine can be programmed and controlled to deposit different etchant chemistries on different materials with varying depths of penetration. This allows for the precise control of etching critical dimensions into the wafer surface and for the creation of intricate designs and patterns. In addition to its accuracy and precision of etching, 915 also incorporates a number of safety features, such as a protective hood and confining safety doors, as well as a vacuum chamber to collect any hazardous by-products produced during the etching process. The tool is also equipped with an automated, self-cleaning function that reduces the contamination of the asset and the wafer. TEGAL 915 is a highly advanced etching/Asher model designed to satisfy the most demanding etching needs. Its precision, safety, and advanced control features make it a highly reliable and efficient equipment for etching a wide range of materials.
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